Safely treats various gases

In semiconductor manufacturing, abatement systems (exhaust gas treatment equipment) and related utility facilities play a major role in safely treating the various gases generated during the process. However, conventional treatment configurations often require dilution and large-scale treatment equipment to ensure safety, as well as downstream water treatment equipment, which can have a significant impact on factory planning in terms of not only equipment costs but also installation space and operational load. As a result, it is not uncommon for area that would otherwise be used for production equipment to be taken up by treatment equipment and related infrastructure.

To address these semiconductor exhaust gas treatment challenges, HELIX Environmental Development proposes a review of treatment configurations using technology that "creates plasma from water." The key point is that, rather than requiring large-scale renovations of existing factory equipment, the current treatment flow and equipment configuration can be utilized, allowing for consideration of introduction as an additional step in the latter or final stage (point of use/last mile) as needed. This makes it easier to review configurations that tend to rely on dilution and large-scale equipment, and to downsize treatment equipment and related water treatment facilities and reduce operational loads depending on application conditions.

Furthermore, HELIX Environmental Development places emphasis on designing a treatment process that will work on-site, taking into account not only the performance of the equipment itself, but also connectivity with existing facilities, installation space, utility requirements, maintenance and operation systems, and the impact on production. By reducing the area and infrastructure burden required for exhaust gas treatment, we aim to make it easier to allocate space within the factory for production equipment and future expansion, achieving both environmental friendliness and productivity.